Dichlorosilane

Dichlorosilane
IUPAC name Dichlorosilane
Other names Silicic dichloride dihydride
Identifiers
CAS number	4109-96-0 Y
PubChem	61330, 22967941 ((2H2)silane)
ChemSpider	55266 Y
EC number	22​3-888-3
UN number	2189
RTECS number	VV3050000
Jmol-3D images	Image 1
SMILES Cl[SiH2]Cl
InChI InChI=1S/Cl2H2Si/c1-3-2/h3H2 Y Key: MROCJMGDEKINLD-UHFFFAOYSA-N Y InChI=1/Cl2H2Si/c1-3-2/h3H2 Key: MROCJMGDEKINLD-UHFFFAOYAF
Properties
Molecular formula	H2Cl2Si
Molar mass	101.01 g mol−1
Exact mass	99.930282011 g mol-1
Appearance	Colorless gas with characteristic odor
Melting point	-122 °C, 151 K, -188 °F
Boiling point	8 °C, 281 K, 46 °F
Solubility in water	Reacts
Vapor pressure	163.6 kPa (20 °C)
Hazards
MSDS	ICSC 0442
EU Index	Not listed
Main hazards	Extremely flammable gas, explosive in air
NFPA 704	4 4 2 W
Flash point	−28 °C
Explosive limits	4.1–99%
Related compounds
Related chlorosilanes	Chlorosilane Trichlorosilane Silicon tetrachloride
Related compounds	Difluorosilane Dibromosilane Dichloromethane
Y (verify) (what is: Y/N?) Except where noted otherwise, data are given for materials in their standard state (at 25 °C, 100 kPa)
Infobox references

Dichlorosilane (H₂SiCl₂), or DCS as it is commonly known, is usually mixed with ammonia (NH₃) in LPCVD chambers to grow silicon nitride in semiconductor processing.

A higher concentration of DCS:NH₃ (i.e. 16:1), usually results in lower stress nitride films.

It is an intermediate between silane and silicon tetrachloride.

External links

• Safety data for dichlorosilane from the Chemistry Department at Oxford University.