Oxalyl fluoride

Oxalyl fluoride: Oxalyl fluoride

IUPAC name

Oxalyl difluoride

Other names

Oxalyl fluoride, ethanedioyl difluoride

Identifiers

CAS number 359-40-0

PubChem 9668

EC number 206-630-4

Jmol-3D images Image 1

SMILES

C(=O)(C(=O)F)F

InChI

InChI=1/C2F2O2/c3-1(5)2(4)6

Properties

Molecular formula C₂F₂O₂

Molar mass 94.017 g/mol

Y fluoride (verify) (what is: Y/N?)
Except where noted otherwise, data are given for materials in their standard state (at 25 °C, 100 kPa)

Infobox references

Oxalyl fluoride is a fluorinated derivative of oxalic acid. It is being investigated for use in etching as a replacement for compounds which have the liability of high global warming potential.^[1]^[2]

See also

Oxalyl chloride

References

^ Method of etching and cleaning using fluorinated carbonyl compounds, US Patent 6635185.

^ Simon Karecki, Ritwik Chatterjee, Laura Pruette, Rafael Reif, Terry Sparks, Laurie Beu, Victor Vartanian, and Konstantin Novoselovc (2001). "Evaluation of Oxalyl Fluoride for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool". J. Electrochem. Soc. 148 (3): G141–G149. doi:10.1149/1.1348263.

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Academic Dictionaries and Encyclopedias

Oxalyl fluoride

IUPAC name Oxalyl difluoride
Other names Oxalyl fluoride, ethanedioyl difluoride
Identifiers
CAS number	359-40-0
PubChem	9668
EC number	206-630-4
Jmol-3D images	Image 1
SMILES C(=O)(C(=O)F)F
InChI InChI=1/C2F2O2/c3-1(5)2(4)6
Properties
Molecular formula	C₂F₂O₂
Molar mass	94.017 g/mol
Y fluoride (verify) (what is: Y/N?) Except where noted otherwise, data are given for materials in their standard state (at 25 °C, 100 kPa)
Infobox references