Beam lead Technology

Beam lead Technology

Beam Lead Technology is the name given to the structure and method of micro-fabricating a semiconductor device structure. Its original application was to high-frequency silicon switching transistors and ultra-high-speed integrated circuits.

History

In the early 1960's, M.P. Lepselter [M.P. Lepselter, et al, "Beam-Lead Devices and Integrated Circuits", "Proceedings of the IEEE", Vol. 53 No 4 (1965), p.405.] , [Presentation at Electron Devices Meeting, October 29, 1964, Washington, D.C.] developed the techniques for fabricating a structure consisting of electroforming an array of thick, self-supporting gold patterns on a thin film Ti-Pt Au base, hence the name "beams", deposited on the surface of a silicon wafer. The excess semiconductor from under the beams was removed, thereby separating the individual devices and leaving them with self-supporting beam leads or internal chiplets cantilevered beyond the semiconductor. The contacts served as electrical leads in addition to also serving the purpose of structural support for the devices.

Patents

Patented inventions included:

# Selective Removal of Material Using Cathodic Sputtering (Plasma Etching/RIE), US Patent #3,271,286; issued 1966
# PtSi Semiconductor Contacts and Schottky Diodes (PtSi Schottky Diodes), US Patent #3,274,670; issued 1966
# Semiconductive Device Including Beam Leads (Beam Leads,Ti-Pt-Au metal system), US Patent #3,426,252; issued 1969
# Method for Making Closely Spaced Conductive Layers (Air-Insulated Crossovers, air bridges, RF-Switch), US Patent #3,461,524; issued 1969
# Vibratory Reed Device (MEMS), US Patent #3,609,593; issued 1971

Legacy

This technology, also known as air-bridge technology, has established itself for its unsurpassed reliability in high-frequency silicon switching transistors and ultra-high-speed integrated circuits for telecommunications and missile systems. The Beam Lead devices, produced by the hundreds of millions, became the first example of a commercial microelectromechanical structure (MEMS).

References


Wikimedia Foundation. 2010.

Игры ⚽ Поможем решить контрольную работу

Look at other dictionaries:

  • technology, history of — Introduction       the development over time of systematic techniques for making and doing things. The term technology, a combination of the Greek technē, “art, craft,” with logos, “word, speech,” meant in Greece a discourse on the arts, both… …   Universalium

  • Technology in The Hitchhiker's Guide to the Galaxy — The fictional universe of The Hitchhiker s Guide to the Galaxy series by Douglas Adams is a galaxy spanning society of interacting extraterrestrial cultures, so the technological level in the series is highly advanced, though often unreliable.… …   Wikipedia

  • Electron beam welding — (EBW) is a fusion welding process in which a beam of high velocity electrons is applied to the materials being joined. The workpieces melt as the kinetic energy of the electrons is transformed into heat upon impact, and the filler metal, if used …   Wikipedia

  • photography, technology of — Introduction       equipment, techniques, and processes used in the production of photographs.  The most widely used photographic process is the black and white negative–positive system (Figure 1 >). In the camera the lens projects an image of… …   Universalium

  • Ancient technology in Stargate — The Ancients (also known as Alterans and Lanteans ) are a fictional advanced race in the Stargate franchise, and are depicted as the precursor to modern day humans. Their most notable creation in Stargate mythology is the entire Stargate network …   Wikipedia

  • Surface-mount technology — (SMT) is a method for constructing electronic circuits in which the components (SMC, or Surface Mounted Components) are mounted directly onto the surface of printed circuit boards (PCBs). Electronic devices so made are called surface mount… …   Wikipedia

  • List of After Colony technology — This is a list of fictional technology from the After Colony timeline of the Gundam anime metaseries.In the After Colony timeline there are generally few explanations about the technology, as the series focuses more on character development. Most …   Wikipedia

  • Banpresto Originals Technology — This article is about fictional technology from the Banpresto Original Generation universe of the Super Robot Wars metaseries.Black Hole EngineAn experimental energy system, created with Extra Over Technology, the Black Hole Engine has energy… …   Wikipedia

  • Old Bess (beam engine) — Old Bess, as now preserved in the Science Museum, London Old Bess is an early beam engine built by the partnership of Boulton and Watt. The engine was constructed in 1777 and worked until 1848.[1] …   Wikipedia

  • Stevens Institute of Technology — Infobox University name = Stevens Institute of Technology motto = Per aspera ad astra ( Through adversity to the stars ) established = 1870 type = Private endowment = $130,159,592 president = Harold J. Raveché [http://www.stevens.edu/president]… …   Wikipedia

Share the article and excerpts

Direct link
… Do a right-click on the link above
and select “Copy Link”