- Wet etching
In
microfabrication , wet etching ischemical etching performed with aliquid etchant, as opposed to a plasma. See alsoEtching (microfabrication) .
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Wet etching
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wet etching — skystasis ėsdinimas statusas T sritis radioelektronika atitikmenys: angl. wet etching vok. naßchemisches Ätzen, n rus. жидкостное травление, n pranc. décapage liquide, m … Radioelektronikos terminų žodynas
Etching (microfabrication) — Etching tanks used to perform Piranha, Hydrofluoric acid or RCA clean on 4 inch wafer batches at LAAS technological facility in Toulouse, France Etching is used in microfabrication to chemically remove layers from the surface of a wafer during… … Wikipedia
Dry etching — refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes… … Wikipedia
Industrial etching — For other uses, see Etching (disambiguation). Etched in ferric chloride for PCB production at home In industry, etching, also known as chemical milling, is the process of using acids, bases or other chemicals to dissolve unwanted materials such… … Wikipedia
Reactive-ion etching — (RIE) is an etching technology used in microfabrication. It uses chemically reactive plasma to remove material deposited on wafers. The plasma is generated under low pressure (vacuum) by an electromagnetic field. High energy ions from the plasma… … Wikipedia
Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… … Wikipedia
Semiconductor device fabrication — Semiconductor manufacturing processes 10 µm 1971 3 µm 1975 1.5 µm 1982 … Wikipedia
Phosphoric acid — This article is about orthophosphoric acid. For other acids commonly called phosphoric acid , see Phosphoric acids and phosphates. Phosphoric acid … Wikipedia
Microfabrication — Synthetic detail of a micromanufactured integrated circuit through four layers of planarized copper interconnect, down to the polysilicon (pink), wells (greyish) and substrate (green) Microfabrication is the term that describes processes of… … Wikipedia
Bulk micromachining — is a process used to produce micromachinery or microelectromechanical systems (MEMS).Unlike surface micromachining, which uses a succession of thin film deposition and selective etching, bulk micromachining defines structures by selectively… … Wikipedia
