- Plasma source
Plasma sources generate plasmas.
Excitation of a plasma requires partial
ionization of neutralatom s and/ormolecule s of a medium. There are several ways to causeionization :collisions of energetic particles, strong electric fields acting on bondelectron s, or ionizing radiation. Thekinetic energy for ionizing collisions may come from theheat of chemical or nuclear reactions of the medium, as inflame s, for instance. Alternatively, already released charged particles may be accelerated byelectric field s, generated electromagnetically or by radiation fields.If at least as manycharge carrier s are created per time unit asrecombine, the plasma can be sustained.Plasma excitation by
electromagnetic field s can be classified according to:*
Frequency classification of plasmas
*Energy coupling mode
**Inductively coupled plasma
***Solenoid coil
***Planar coil
***Helical resonator
**Capacitively coupled plasma
***Single-frequency capacitively coupled plasma
***Dual-frequency capacitively coupled plasma
**Wave-heated plasma
***Electron cyclotron resonance
***Helicon discharge
***Surface-wave-sustained mode
***Resonator mode
**Electrodeless plasma excitation
*Pressure range classification
**Low pressure discharge
**Atmospheric pressure discharge Plasma sources have numerous technical applications, for instance in
light generation andplasma processing of materials.External links
* [http://www.tectra-gmbh.com/plasma-source.htm Plasma Source] as Atom Source, Ion Source and Atom/Ion Hybrid Source
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