- Silicide
A silicide is a compound that has
silicon with moreelectropositive elements.Silicon is more
electropositive than carbon. Silicides are structurally closer toboride s than tocarbide s.Similar to borides and carbides, the composition of silicides cannot be easily specified as covalent molecules. The chemical bonds in silicides range from conductive metal-like structures to covalent or ionic. Silicides of all non-transition metals, with exception of
beryllium , have been described.Mercury,
thallium ,bismuth , and lead are nonmiscible with liquid silicon.Silicon atoms in silicides can have many possible organizations:
* Isolated silicon atoms: electrically conductive Cu5Si, (V,Cr,Mn)3Si, Fe3Si, Mn3Si, and nonconductive (Mg,Ge,Sn,Pb)2Si, (Ca,Ru,Ce,Rh,Ir,Ni)2Si)
* Si2 pairs: Uranium3Si2, Hafnium and Thorium silicides
* Si4 tetrahedra: PotassiumSi, RubidiumSi, CaesiumSi
* Sin chains: USi, (Ti, Zr, Hf, Th, Ce, Pu)Si, CaSi, SrSi, YSi
* Planar hexagonalgraphite -like Si layers: β-USi2, silicides of otherlanthanoid s andactinoid s
* Corrugated hexagonal Si layers: CaSi2
* Open three-dimensional Si skeletons: SrSi2, ThSi2, α-USi2Group 1 and 2 silicides e.g. Na2Si and Ca2Si react with water to yielding hydrogen and/or silanes. The
transition metal silicides are, in contrast, usually inert to aqueous solutions of everything with exception ofhydrofluoric acid ; however, they react with more aggressive agents, eg. meltedpotassium hydroxide , orfluorine andchlorine when red-hot.Silicide prepared by a self-aligned process is called
salicide . This is a process in which silicide contacts are formed only in those areas in which deposited metal (which after annealing becomes a metal component of the silicide) is in direct contact with silicon, hence, the process is self-aligned. It is commonly implemented in MOS/CMOS processes for ohmic contacts of the source, drain, and poly-Si gate.Examples
*
nickel silicide , NiSi
*sodium silicide , Na2Si
*magnesium silicide , Mg2Si
*Platinum silicide , PtSi
*Titanium silicide , TiSi2
*Tungsten silicide , WSi2See for a list.References
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