PROLITH

PROLITH

PROLITH (abbreviated from Positive Resist Optical LITHography) is a computer simulator modeling the optical and chemical aspects of photolithography. Chris Mack started developing PROLITH after he began working in the field of photolithography at the NSA in 1983.

PROLITH was first developed on an IBM PC. The models implemented by the software were based on the work done by Rick Dill at IBM and Andy Neureuther at UC Berkley, together with Chris Mack's own contributions such as the Mack model.

Originally PROLITH was given away for free, while NSA was paying Chris Mack's salary. [cite web|url=http://www.lithoguru.com/scientist/litho_papers/2005_Thirty_Years_of_Lithography_Simulation.pdf|title=30 Years of Lithography Simulation — Chris Mack's account of progress in lithography simulation and PROLITH] [cite web|url = http://www.lithoguru.com/scientist/resume.html | title = Chris Mack's resume] In 1990 he founded FINLE Technologies to commercialize PROLITH. The first commercial version of the software, named PROLITH/2, was released in June of that year. PROLITH was made easier to use and it grew to include many more aspects of lithography simulation.

FINLE Technologies was purchased in February 2000 by KLA-Tencor, which now markets PROLITH.

References

External links

* [http://www.kla-tencor.com/j/servlet/Product?prodID=36 PROLITH product page at KLA-Tencor]


Wikimedia Foundation. 2010.

Игры ⚽ Нужен реферат?

Look at other dictionaries:

  • Chris Mack (scientist) — Chris Mack is an expert in photolithography. He received multiple undergraduate degrees from Rose Hulman Institute of Technology in 1982, a master of science degree in electrical engineering from the University of Maryland, College Park in 1989,… …   Wikipedia

  • Computational lithography — (also known as computational scaling) is the set of mathematical and algorithmic approaches designed to improve the resolution attainable through photolithography. Computational lithography has come to the forefront of photolithography in 2008 as …   Wikipedia

Share the article and excerpts

Direct link
Do a right-click on the link above
and select “Copy Link”