Journal of Vacuum Science and Technology
- Journal of Vacuum Science and Technology
The name Journal of Vacuum Science and Technology (JVST) combines two scientific journals, JVST A and JVST B, published by [http://www.avs.org/|American Vacuum Society] since the year 1964.
JVST A
Journal of Vacuum Science and Technology A specializes in applied surface science, electronic materials and processing, fusion technology, plasma technology, surface science, thin films, vacuum metallurgy, and vacuum technology.
Editor: G. Lucovsky, Department of Physics, North Carolina State University.
Contnent of the Journal: http://scitation.aip.org/dbt/dbt.jsp?KEY=JVTAD6
JVST B
Journal of Vacuum Science and Technology B specializes in vacuum processing and plasma processing of various materials, the structural characterization, microlithography, and the physics and chemistry of submicrometer and nanometer structures and devices.
Editor: Gary E. McGuire, International Technology Center link required.
Content of the Journal: http://scitation.aip.org/dbt/dbt.jsp?KEY=JVTBD9
External links
Homepage of JVSTA: http://scitation.aip.org/jvsta
Homepage of JVSTB: http://www.avs.org/literature.jvst.b.aspx
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