- ISO 14644
ISO 14644 Standards were first formed from the US Federal Standard 209E Airborne Particulate Cleanliness Classes in
Cleanrooms and Clean Zones. The need for a single standard for cleanroom classification and testing was long felt. After ANSI andIEST petitioned to ISO for new standards, the first document of ISO 14644 was published in 1999,ISO 14644-1 . [cite web
title=ISO 14644 History
publisher=TSS, Inc.
year=Last updated2007-12-03
url=http://www.techsafety.com/news_industry.html
accessdate=2008-01-17]In 2000,
ISO 14644-2 was published, which began the process ofFED-STD-209E being canceled. On November 29, 2001, the document was canceled and superseded byISO 14644-1 andISO 14644-2 . [cite web
title=FED-STD-209E Cancellation
publisher=IEST
year=Last updated2007-12-03
url=http://www.iest.org/i4a/pages/index.cfm?pageid=3480
accessdate=2008-01-17]ISO 14644 is now composed of:
*
ISO 14644-1 : Classification of air cleanlinesscite web
title=ISO 14644 Standards
publisher=IEST
year=Last updated2007-12-03
url=http://www.iest.org/i4a/pages/index.cfm?pageid=3322
accessdate=2008-01-17]
*ISO 14644-2 : Specifications for testing and monitoring to prove continued compliance withISO 14644-1
*ISO 14644-3 : Test Methods
*ISO 14644-4 : Design, Construction, and Start-up
*ISO 14644-5 : Operations
*ISO 14644-6 : Vocabulary
*ISO 14644-7 : Separative devices (clean air hoods, gloveboxes, isolators and minienvironments
*ISO 14644-8 : Classification of airborne molecular contamination
*ISO 14644-9 : Classification of surface particle cleanliness
**ISO 14644-9 is current a Committee DraftReferences
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