Tetrakis(dimethylamino)titanium(IV)

Chembox new
Name = Tetrakis(dimethylamino)titanium(IV)
ImageFile=TDMAT.png ImageSize=150px
IUPACName = Tetrakis(dimethylamido)titanium(IV)
OtherNames = titanium(IV)dimethylamide, TDMAT, tetrakis (dimethylamido)-titanium(IV)
Section1 = Chembox Identifiers
CASNo = 3275-24-9
RTECS = ?
Section2 = Chembox Properties
Formula = C₈H₂₄N₄Ti
MolarMass = 224.19 g/mol
Appearance = yellow liquid
Density = 0.947 g/cm³
Solubility = reacts with water
BoilingPt = 50 °C at 0.05mmHg
Section7 = Chembox Hazards
EUClass = ?
NFPA-H = 3
NFPA-F = 3
NFPA-R = 2
RPhrases = 11-14-34| SPhrases = 16 - 26 - 36/37/39 - 43 - 45

Tetrakis(dimethylamino)titanium(IV) (TDMAT) is a chemical compound. It is used in a chemical vapor deposition process that uses metalorganic source gases. TDMAT is used to create a titanium nitride (TiN) surface layer.

See also

*Metalorganic chemical vapor deposition (MOCVD), general process which includes using TDMAT but also uses many other gases to layer other substances.

External links

* [http://www.praxair.com/praxair.nsf/AllContent/7E5C3B5BF7ED869F85256FB0007866B5/$File/p6331.pdf Praxair MSDS]