Tetramethylammonium hydroxide
- Tetramethylammonium hydroxide
chembox new
ImageFile=TMAH.svg
ImageSize=
IUPACName=tetramethylammonium hydroxide
OtherNames=
Section1=Chembox Identifiers
CASNo=
PubChem=60966
SMILES=C [N+] (C)(C)C. [OH-]
Section2=Chembox Properties
C=4 | H =13 | N = 1 | O = 1
Appearance=
Density=
MeltingPt=
BoilingPt=
Solubility=
Section3=Chembox Hazards
MainHazards=
FlashPt=
Autoignition=
Tetramethylammonium hydroxide (TMAH or TMAOH) is a quaternary ammonium salt with the molecular formula (CH3)4NOH. It is used as an anisotropic etchant of silicon. It is also used as a basic solvent in the development of acidic photoresist in the photolithography process. Since it is a phase transfer catalyst, it is highly effective in stripping photoresist. It is used to prevent the nanoparticles in a ferrofluid from sticking together.
Toxicity
TMAH solution is a strong base. The tetramethylammonium ion can damage nerves and muscles, causing difficulties in breathing and possibly death in a short period of time after exposure by contact even with a small amount. It also smells like dead fish, if it is not pure, from trimethylamine impurity. TMAH has virtually no odor when pure.
Wet anisotropic Etching
TMAH solution is used to anisotropically etch silicon along its crystallographic axis. TMAH doesn't etch silicon nitride or silicon oxide. They are often used as mask for long Silicon etches.
Wikimedia Foundation.
2010.
Look at other dictionaries:
tetramethylammonium hydroxide — tet·ra·meth·yl·am·mo·ni·um hy·drox·ide (tet″rə meth″əl ə moґne əm hi drokґsīd) a toxic fraction isolated from the sea anemone, Actinia equina, and from the salivary glands of whelks … Medical dictionary
hydroxide — /huy drok suyd, sid/, n. a chemical compound containing the hydroxyl group. [1820 30; HYDR 2 + OXIDE] * * * Any compound with one or more functional groups made up of one atom each of hydrogen and oxygen, bonded together and acting as the… … Universalium
Ammonium hydroxide — Main article: Ammonia Ammonium hydroxide … Wikipedia
TMH — tetramethylammonium hydroxide … Medical dictionary
TMH — • tetramethylammonium hydroxide … Dictionary of medical acronyms & abbreviations
Etching (microfabrication) — Etching tanks used to perform Piranha, Hydrofluoric acid or RCA clean on 4 inch wafer batches at LAAS technological facility in Toulouse, France Etching is used in microfabrication to chemically remove layers from the surface of a wafer during… … Wikipedia
Tetramethylammoniumhydroxid — Strukturformel Allgemeines Name Tetramethylammoniumhydroxid Summenformel … Deutsch Wikipedia
Organic base — Acids and Bases Acid dissociation constant Acid base extraction Acid–base reaction Acid–base titration Dissociation constant Acidity function Buffer sol … Wikipedia
Common reagents — This is a list of common inorganic and organic reagents often used in chemistry. Contents 1 Synopsis 2 Reagent Compounds 3 See also 4 References S … Wikipedia
Hydrogen bond — A hydrogen bond results from a dipole dipole force between an electronegative atom and a hydrogen atom bonded to nitrogen, oxygen or fluorine (thus the name hydrogen bond , which must not be confused with a covalent bond to hydrogen). The energy… … Wikipedia
