isotropic etching — izotropinis ėsdinimas statusas T sritis radioelektronika atitikmenys: angl. isotropic etching vok. isotropes Ätzen, n rus. изотропное травление, n pranc. décapage isotrope, m … Radioelektronikos terminų žodynas
Etching (microfabrication) — Etching tanks used to perform Piranha, Hydrofluoric acid or RCA clean on 4 inch wafer batches at LAAS technological facility in Toulouse, France Etching is used in microfabrication to chemically remove layers from the surface of a wafer during… … Wikipedia
Deep reactive-ion etching — (DRIE) is a highly anisotropic etch process used to create deep penetration, steep sided holes and trenches in wafers, with aspect ratios of 20:1 or more. It was developed for microelectromechanical systems (MEMS), which require these features,… … Wikipedia
Dry etching — refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of ions (usually a plasma of reactive gases such as fluorocarbons, oxygen, chlorine, boron trichloride; sometimes… … Wikipedia
Reactive-ion etching — (RIE) is an etching technology used in microfabrication. It uses chemically reactive plasma to remove material deposited on wafers. The plasma is generated under low pressure (vacuum) by an electromagnetic field. High energy ions from the plasma… … Wikipedia
Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… … Wikipedia
Fluorine — Fluorine, la. fluorum, meaning to flow ), is the chemical element with the symbol F and atomic number 9. Atomic fluorine is univalent and is the most chemically reactive and electronegative of all the elements. In its elementally isolated (pure)… … Wikipedia
décapage isotrope — izotropinis ėsdinimas statusas T sritis radioelektronika atitikmenys: angl. isotropic etching vok. isotropes Ätzen, n rus. изотропное травление, n pranc. décapage isotrope, m … Radioelektronikos terminų žodynas
isotropes Ätzen — izotropinis ėsdinimas statusas T sritis radioelektronika atitikmenys: angl. isotropic etching vok. isotropes Ätzen, n rus. изотропное травление, n pranc. décapage isotrope, m … Radioelektronikos terminų žodynas
izotropinis ėsdinimas — statusas T sritis radioelektronika atitikmenys: angl. isotropic etching vok. isotropes Ätzen, n rus. изотропное травление, n pranc. décapage isotrope, m … Radioelektronikos terminų žodynas
