Polycide

Polycide

Polycide is a silicide formed over polysilicon. Widely used in DRAMs. In a polycide MOS transistor process, the silicide is formed only over the polysilicon film as formation occurs prior to any polysilicon etch. Polycide processes contrast with salicide processes in which silicide is formed after the polysilicon etch. Thus, with a salicide process, silicide is formed over both the polysilicon gate and the exposed monocrystalline terminal regions of the transistor in a self-aligned fashion.


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  • polycide auto-aligné — susitapatinantysis polikristalinio silicio ir silicido darinys statusas T sritis radioelektronika atitikmenys: angl. self aligned polycide vok. selbstjustiertes Polycid, n rus. самосовмещённый полицид, m pranc. polycide auto aligné, m …   Radioelektronikos terminų žodynas

  • polycide gate — polikristalinio silicio ir silicido užtūra statusas T sritis radioelektronika atitikmenys: angl. polycide gate; polysilicon silicide gate vok. Silizid Polysilizium Gate, n rus. затвор из поликремния и силицида металла, m pranc. grille… …   Radioelektronikos terminų žodynas

  • self-aligned polycide — susitapatinantysis polikristalinio silicio ir silicido darinys statusas T sritis radioelektronika atitikmenys: angl. self aligned polycide vok. selbstjustiertes Polycid, n rus. самосовмещённый полицид, m pranc. polycide auto aligné, m …   Radioelektronikos terminų žodynas

  • selbstjustiertes Polycid — susitapatinantysis polikristalinio silicio ir silicido darinys statusas T sritis radioelektronika atitikmenys: angl. self aligned polycide vok. selbstjustiertes Polycid, n rus. самосовмещённый полицид, m pranc. polycide auto aligné, m …   Radioelektronikos terminų žodynas

  • susitapatinantysis polikristalinio silicio ir silicido darinys — statusas T sritis radioelektronika atitikmenys: angl. self aligned polycide vok. selbstjustiertes Polycid, n rus. самосовмещённый полицид, m pranc. polycide auto aligné, m …   Radioelektronikos terminų žodynas

  • самосовмещённый полицид — susitapatinantysis polikristalinio silicio ir silicido darinys statusas T sritis radioelektronika atitikmenys: angl. self aligned polycide vok. selbstjustiertes Polycid, n rus. самосовмещённый полицид, m pranc. polycide auto aligné, m …   Radioelektronikos terminų žodynas

  • Policide (engineering) — Policide (also spelled polyside) in engineering refers to a combination of a silicide and polysilicon.In chemical engineering, policide or polyside is used to describe a combination of polysilicon and a silicide. [cite journal last = Yckache… …   Wikipedia

  • Salicide — The term salicide refers to a technology used in the microelectronics industry used to form electrical contacts between the semiconductor device and the supporting interconnect structure. The salicide process involves the reaction of a thin metal …   Wikipedia

  • Silizid-Polysilizium-Gate — polikristalinio silicio ir silicido užtūra statusas T sritis radioelektronika atitikmenys: angl. polycide gate; polysilicon silicide gate vok. Silizid Polysilizium Gate, n rus. затвор из поликремния и силицида металла, m pranc. grille… …   Radioelektronikos terminų žodynas

  • grille polysilicium-siliciure — polikristalinio silicio ir silicido užtūra statusas T sritis radioelektronika atitikmenys: angl. polycide gate; polysilicon silicide gate vok. Silizid Polysilizium Gate, n rus. затвор из поликремния и силицида металла, m pranc. grille… …   Radioelektronikos terminų žodynas

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